MN602 Production of Nanomaterials: Vacuum Techniques

6 ECTS - 3-0 Duration (T+A)- . Semester- 3 National Credit

Information

Unit INSTITUTE OF NATURAL AND APPLIED SCIENCES
ADVANCED MATERIALS AND NANOTECHNOLOGY (PhD) (ENGLISH) (INTERDISCIPLINARY)
Code MN602
Name Production of Nanomaterials: Vacuum Techniques
Term 2025-2026 Academic Year
Term Fall
Duration (T+A) 3-0 (T-A) (17 Week)
ECTS 6 ECTS
National Credit 3 National Credit
Teaching Language İngilizce
Level Doktora Dersi
Type Normal
Mode of study Yüz Yüze Öğretim
Catalog Information Coordinator Doç. Dr. DOĞAN KAYA
Course Instructor
The current term course schedule has not been prepared yet.


Course Goal / Objective

This course aims to gain an in-depth understanding of vacuum science and technology. It will also provide an introduction to vacuum components, measurements, design and basic principles needed to achieve high and ultra-high vacuum. Students will develop the fundamentals of vacuum technology for Nanoscience and Nanotechnology, learn the relationship between vacuum science and Nanoscience, vacuum creation, pumps for high and ultra-high vacuum applications, mass analysis and pressure measurements in vacuum, system design and components, high and ultra-high vacuum based processes, sputter coating fundamentals, ion beam sputter coating, Molecular Beam Epitaxy (MBE), nanofabrication in MBE, pulsed laser coating and plasma assisted chemical vapor deposition.

Course Content

This course addresses the relationship between vacuum science and nanoscience, starting from the fundamentals of vacuum technology for nanoscience and nanotechnology. It covers topics such as vacuum creation, pumps for high and ultra-high vacuum applications, mass analysis and pressure measurements in vacuum. In addition, system design, high and ultra-high vacuum based processes, modern coating and fabrication techniques such as sputter coating, ion beam sputter coating, Molecular Beam Epitaxy (MBE), nanofabrication, pulsed laser coating and plasma-assisted chemical vapor deposition will be introduced.

Course Precondition

There is no prerequisite for this course.

Resources

1-) Handbook of Vacuum Science and Technology, Dorothy M. Hoffman, Bawa Singh, John H. Thomas, Academic Press 2-) Vacuum : Science, Technology and Applications, Pramod K. Naik, CRC Pres.

Notes

Lecture notes.


Course Learning Outcomes

Order Course Learning Outcomes
LO01 Learn the basic principles of vacuum technology for nanoscience and nanotechnology.
LO02 Comprehend the relationship between vacuum science and nanoscience and understand how these two fields interact.
LO03 Gains knowledge of the pumps required for vacuum creation and high-ultra-high vacuum applications.
LO04 Gains the ability to perform mass analysis and pressure measurements in vacuum environments.
LO05 Understand high and ultra-high vacuum based processes and learn how to design them.
LO06 Learn modern techniques such as sputter coating, Molecular Beam Epitaxy (MBE), nanofabrication and plasma assisted chemical vapor deposition and gain practical knowledge.


Relation with Program Learning Outcome

Order Type Program Learning Outcomes Level
PLO01 Bilgi - Kuramsal, Olgusal Based on the qualifications gained during PhD studies, develops and deepens the current and advanced knowledge in the area by unique means of thinking and / or research at mastery level and comes up with original definitions which bring about novelty to the area. 3
PLO02 Beceriler - Bilişsel, Uygulamalı Can effectively use the equipment used in the field.
PLO03 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Selects experimental measurement methods of various physical quantities and uses instruments in accordance with their sensitivity limits.
PLO04 Yetkinlikler - Alana Özgü Yetkinlik Interprets experimental and observational results. 3
PLO05 Yetkinlikler - Öğrenme Yetkinliği Can draw conclusions from the information obtained during the preparation for the PhD qualifying exam.
PLO06 Bilgi - Kuramsal, Olgusal Can interpret the information acquired about the field orally and in writing. 4
PLO07 Bilgi - Kuramsal, Olgusal Uses mathematical methods related to the field of study.
PLO08 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Have knowledge about the logic, design, conclusion and dissemination of results of scientific research.
PLO09 Bilgi - Kuramsal, Olgusal Uses the theoretical and applied knowledge gained in the field of materials and nanotechnology at the level of expertise. 3
PLO10 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Gains high-level skills in using research methods in studies related to materials science and nanotechnology.
PLO11 Bilgi - Kuramsal, Olgusal Develops a scientific method that brings innovation to science. 2
PLO12 Yetkinlikler - Alana Özgü Yetkinlik Makes critical analysis, synthesis and evaluation of new ideas related to the field.
PLO13 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Can carry out independent research on a specific topic related to materials and nanotechnology.
PLO14 Yetkinlikler - İletişim ve Sosyal Yetkinlik Be able to lead in the execution of interdisciplinary studies.
PLO15 Yetkinlikler - Öğrenme Yetkinliği Follows the developments in the her/his field of study and constantly renews herself/himself. 4
PLO16 Bilgi - Kuramsal, Olgusal Calculate the predictions of the theories and compare them with the experimental results.
PLO17 Yetkinlikler - Öğrenme Yetkinliği Comprehends the interdisciplinary interaction that the field of study is related to. 3
PLO18 Yetkinlikler - Alana Özgü Yetkinlik He/she shares his/her own ideas and suggestions regarding the problems in the field of study with groups in and outside the field by supporting them with quantitative and qualitative data.
PLO19 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Can develop original solutions for problems in the field. 3
PLO20 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Can prepare a scientific article and publish scientific articles in international refereed journals. 2


Week Plan

Week Topic Preparation Methods
1 Vacuum Technology Fundamentals for Nanoscience and Nanotechnology Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Soru-Cevap, Tartışma
2 Nanoscience and Vacuum Science Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Soru-Cevap, Tartışma
3 Vacuum Formation Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
4 Pumps for High and Ultra-High Vacuum Applications Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
5 Mass Analysis and Pressure Measurements in Vacuum Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
6 System Design and Components Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
7 High and Ultra-High Vacuum Based Processes Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
8 Mid-Term Exam Examination of course resources Ölçme Yöntemleri:
Yazılı Sınav, Ödev
9 Sputter Coating Basics Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
10 Magnetron Sputter Coating Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
11 Ion Beam Sputter Coating Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
12 Molecular Beam Epitaxy (MBE) Basics Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
13 Nanofabrication in MBE Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
14 Pulsed Laser Cladding Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
15 Plasma Assisted Chemical Vapor Deposition Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
16 Term Exams Examination of course resources Ölçme Yöntemleri:
Yazılı Sınav, Ödev
17 Term Exams Examination of course resources Ölçme Yöntemleri:
Yazılı Sınav, Ödev


Student Workload - ECTS

Works Number Time (Hour) Workload (Hour)
Course Related Works
Class Time (Exam weeks are excluded) 14 3 42
Out of Class Study (Preliminary Work, Practice) 14 5 70
Assesment Related Works
Homeworks, Projects, Others 0 0 0
Mid-term Exams (Written, Oral, etc.) 1 15 15
Final Exam 1 30 30
Total Workload (Hour) 157
Total Workload / 25 (h) 6,28
ECTS 6 ECTS

Update Time: 09.05.2025 01:33