MN603 Nanofabrication: Fundamentals and Applications

6 ECTS - 3-0 Duration (T+A)- . Semester- 3 National Credit

Information

Unit INSTITUTE OF NATURAL AND APPLIED SCIENCES
ADVANCED MATERIALS AND NANOTECHNOLOGY (PhD) (ENGLISH) (INTERDISCIPLINARY)
Code MN603
Name Nanofabrication: Fundamentals and Applications
Term 2025-2026 Academic Year
Term Fall
Duration (T+A) 3-0 (T-A) (17 Week)
ECTS 6 ECTS
National Credit 3 National Credit
Teaching Language İngilizce
Level Doktora Dersi
Type Normal
Mode of study Yüz Yüze Öğretim
Catalog Information Coordinator Doç. Dr. DOĞAN KAYA
Course Instructor
The current term course schedule has not been prepared yet.


Course Goal / Objective

The aim of this course is to familiarize students with nanofabrication processes and basic techniques of nanotechnology. Students will study methods such as lithography, thin film coating, etching, self-assembly and their applications in depth. They will also learn about the fabrication of microelectromechanical systems (MEMS) and molecular nanostructures.

Course Content

This course covers the basic principles and applications of nanofabrication techniques. Methods such as lithography, thin film coating, electrodeposition, thermal spray processes will be taught, with emphasis on applications in nanostructure fabrication and microelectromechanical systems (MEMS). Advanced topics such as etching techniques, self-assembly and fabrication of molecular nanostructures will also be covered.

Course Precondition

There is no prerequisite for this course.

Resources

1-) Nanofabrication: Fundamentals and Applications, Ampere A Tseng, World Scientific Publishing 2-) Handbook of Nanofabrication, Gary Wiederrecht, Academic Press

Notes

Lecture notes.


Course Learning Outcomes

Order Course Learning Outcomes
LO01 In this course, students will learn the basic techniques and processes of nanofabrication.
LO02 In this course, students learn to fabricate nanostructures using nanofabrication techniques such as lithography, thin film coating, electrodeposition.
LO03 Learn how microelectromechanical systems (MEMS) are produced and their application areas.
LO04 Learn the basic principles of self-assembly and nanostructure fabrication.
LO05 Select and use appropriate production methods for nanotechnological applications.


Relation with Program Learning Outcome

Order Type Program Learning Outcomes Level
PLO01 Bilgi - Kuramsal, Olgusal Based on the qualifications gained during PhD studies, develops and deepens the current and advanced knowledge in the area by unique means of thinking and / or research at mastery level and comes up with original definitions which bring about novelty to the area. 3
PLO02 Beceriler - Bilişsel, Uygulamalı Can effectively use the equipment used in the field.
PLO03 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Selects experimental measurement methods of various physical quantities and uses instruments in accordance with their sensitivity limits.
PLO04 Yetkinlikler - Alana Özgü Yetkinlik Interprets experimental and observational results. 3
PLO05 Yetkinlikler - Öğrenme Yetkinliği Can draw conclusions from the information obtained during the preparation for the PhD qualifying exam.
PLO06 Bilgi - Kuramsal, Olgusal Can interpret the information acquired about the field orally and in writing. 4
PLO07 Bilgi - Kuramsal, Olgusal Uses mathematical methods related to the field of study.
PLO08 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Have knowledge about the logic, design, conclusion and dissemination of results of scientific research.
PLO09 Bilgi - Kuramsal, Olgusal Uses the theoretical and applied knowledge gained in the field of materials and nanotechnology at the level of expertise. 3
PLO10 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Gains high-level skills in using research methods in studies related to materials science and nanotechnology. 4
PLO11 Bilgi - Kuramsal, Olgusal Develops a scientific method that brings innovation to science.
PLO12 Yetkinlikler - Alana Özgü Yetkinlik Makes critical analysis, synthesis and evaluation of new ideas related to the field. 2
PLO13 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Can carry out independent research on a specific topic related to materials and nanotechnology. 2
PLO14 Yetkinlikler - İletişim ve Sosyal Yetkinlik Be able to lead in the execution of interdisciplinary studies.
PLO15 Yetkinlikler - Öğrenme Yetkinliği Follows the developments in the her/his field of study and constantly renews herself/himself. 3
PLO16 Bilgi - Kuramsal, Olgusal Calculate the predictions of the theories and compare them with the experimental results. 3
PLO17 Yetkinlikler - Öğrenme Yetkinliği Comprehends the interdisciplinary interaction that the field of study is related to.
PLO18 Yetkinlikler - Alana Özgü Yetkinlik He/she shares his/her own ideas and suggestions regarding the problems in the field of study with groups in and outside the field by supporting them with quantitative and qualitative data.
PLO19 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Can develop original solutions for problems in the field.
PLO20 Yetkinlikler - Bağımsız Çalışabilme ve Sorumluluk Alabilme Yetkinliği Can prepare a scientific article and publish scientific articles in international refereed journals. 3


Week Plan

Week Topic Preparation Methods
1 Lithography Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Soru-Cevap, Tartışma
2 Optical and Electron Beam Lithography Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Soru-Cevap, Tartışma
3 X-ray and Other Lithography Techniques Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
4 Thin Film Coating Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
5 Physical Vapor Deposition Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
6 Chemical Vapor Deposition Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
7 Elektro Depozisyon Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
8 Mid-Term Exam Examination of course resources Ölçme Yöntemleri:
Yazılı Sınav, Ödev
9 Thermal Spray Processes Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
10 Coating Deposition Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
11 Abrasion Wet and Dry Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
12 Self-assembly Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
13 Microelectromechanical Systems Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
14 Two and Three Dimensional Nanostructures and Nanoparticle Production Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
15 Molecular Nanostructures Preparation of textbook and visual slides on the subject Öğretim Yöntemleri:
Tartışma
16 Term Exams Examination of course resources Ölçme Yöntemleri:
Sözlü Sınav, Ödev
17 Term Exams Examination of course resources Ölçme Yöntemleri:
Ödev, Yazılı Sınav


Student Workload - ECTS

Works Number Time (Hour) Workload (Hour)
Course Related Works
Class Time (Exam weeks are excluded) 14 3 42
Out of Class Study (Preliminary Work, Practice) 14 5 70
Assesment Related Works
Homeworks, Projects, Others 0 0 0
Mid-term Exams (Written, Oral, etc.) 1 15 15
Final Exam 1 30 30
Total Workload (Hour) 157
Total Workload / 25 (h) 6,28
ECTS 6 ECTS

Update Time: 09.05.2025 01:11