TÜRKÇE
ENGLISH
Information
| Unit | INSTITUTE OF NATURAL AND APPLIED SCIENCES |
| PHYSICS (PhD) | |
| Code | FK740 |
| Name | Nanofabrication Fundamentals and Applications |
| Term | 2025-2026 Academic Year |
| Term | Spring |
| Duration (T+A) | 3-0 (T-A) (17 Week) |
| ECTS | 6 ECTS |
| National Credit | 3 National Credit |
| Teaching Language | Türkçe |
| Level | Belirsiz |
| Type | Normal |
| Mode of study | Yüz Yüze Öğretim |
| Catalog Information Coordinator | Doç. Dr. DOĞAN KAYA |
| Course Instructor |
The current term course schedule has not been prepared yet.
|
Course Goal / Objective
The aim of this course is to familiarize students with nanofabrication processes and basic techniques of nanotechnology. Students will study methods such as lithography, thin film coating, etching, self-assembly and their applications in depth. They will also learn about the fabrication of microelectromechanical systems (MEMS) and molecular nanostructures.
Course Content
This course covers the basic principles and applications of nanofabrication techniques. Methods such as lithography, thin film coating, electrodeposition, thermal spray processes will be taught, with emphasis on applications in nanostructure fabrication and microelectromechanical systems (MEMS). Advanced topics such as etching techniques, self-assembly and fabrication of molecular nanostructures will also be covered.
Course Precondition
There is no prerequisite for this course.
Resources
Nanofabrication: Fundamentals and Applications, Ampere A Tseng, World Scientific Publishing Handbook of Nanofabrication, Gary Wiederrecht, Academic Press
Notes
Lecture Notes
Course Learning Outcomes
| Order | Course Learning Outcomes |
|---|---|
| LO01 | Select and use appropriate production methods for nanotechnological applications. |
| LO02 | Learn the basic principles of self-assembly and nanostructure fabrication. |
| LO03 | Learn how microelectromechanical systems (MEMS) are produced and their application areas |
| LO04 | In this course, students learn to fabricate nanostructures using nanofabrication techniques such as lithography, thin film coating, electrodeposition. |
| LO05 | In this course, students will learn the basic techniques and processes of nanofabrication. |
Relation with Program Learning Outcome
| Order | Type | Program Learning Outcomes | Level |
|---|---|---|---|
| PLO01 | Bilgi - Kuramsal, Olgusal | Based on the qualifications of the MA level, develops and deepens the current and advanced knowledge in the area by unique means of thinking and / or research at mastery level and comes up with original definitions which bring about novelty to the physics area. | 3 |
| PLO02 | Bilgi - Kuramsal, Olgusal | Use the equipment used in the field. | |
| PLO03 | Bilgi - Kuramsal, Olgusal | Gain experience on experimental measurements and their graphical representation with appropriate units and accuracy | |
| PLO04 | Bilgi - Kuramsal, Olgusal | Interpret observational and experimental results. | 3 |
| PLO05 | Bilgi - Kuramsal, Olgusal | Deduce from sources which are obtained by research during the process of preparing proficiency exam. | |
| PLO06 | Bilgi - Kuramsal, Olgusal | Interpret information in their field written and oral | 4 |
| PLO07 | Bilgi - Kuramsal, Olgusal | Demonstrate the knowledge of appropriate mathematical techniques used in physics. | |
| PLO08 | Bilgi - Kuramsal, Olgusal | Has a knowledge about the logic of scientific research. | |
| PLO09 | Bilgi - Kuramsal, Olgusal | Makes use of the conceptual and practical knowledge acquired in the physics field at mastery level. | 3 |
| PLO10 | Bilgi - Kuramsal, Olgusal | Has attained advanced skills to apply research methods in studies related with the physics area. | 4 |
| PLO11 | Bilgi - Kuramsal, Olgusal | Develops a scientific method that brings innovation to science. | |
| PLO12 | Bilgi - Kuramsal, Olgusal | Performs the critical analysis, synthesis and evaluation of new and complicated thought. | 2 |
| PLO13 | Bilgi - Kuramsal, Olgusal | Can demonstrate the ability to perform an independent research in a specific issue related to physics. | 2 |
| PLO14 | Bilgi - Kuramsal, Olgusal | Acts as a leader in environments where it is necessary to solve original and interdisciplinary problems. | |
| PLO15 | Bilgi - Kuramsal, Olgusal | To keep track of the developments in physics and updates himself/herself invariably. | 3 |
| PLO16 | Bilgi - Kuramsal, Olgusal | Can calculate the predictions of a physical theory and compare with the experimental results. | 3 |
| PLO17 | Bilgi - Kuramsal, Olgusal | Comprehends the interdisciplinary interaction with which the physics area is related. | |
| PLO18 | Bilgi - Kuramsal, Olgusal | Shares his/her ideas and suggestions for solutions to the physical problems with experts and non-experts by supporting them with quantitative and qualitative data. | |
| PLO19 | Bilgi - Kuramsal, Olgusal | Can develop original solutions to physical problems. | |
| PLO20 | Bilgi - Kuramsal, Olgusal | Can prepare a scientific article and can publish scientific articles about his/her field in international refereed journals. | 3 |
Week Plan
| Week | Topic | Preparation | Methods |
|---|---|---|---|
| 1 | Lithography | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma, Soru-Cevap |
| 2 | Optical and Electron Beam Lithography | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Soru-Cevap, Tartışma |
| 3 | X-ray and Other Lithography Techniques | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 4 | Thin Film Coating | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 5 | Physical Vapor Deposition | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 6 | Chemical Vapor Deposition | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 7 | Electro Deposition | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 8 | Mid-Term Exam | Examination of course resources | Ölçme Yöntemleri: Yazılı Sınav, Ödev |
| 9 | Thermal Spray Processes | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Soru-Cevap, Tartışma |
| 10 | Coating Deposition | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 11 | Abrasion Wet and Dry | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 12 | Self-assembly | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 13 | Microelectromechanical Systems | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 14 | Two and Three Dimensional Nanostructures and Nanoparticle Production | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 15 | Molecular Nanostructures | Preparation of textbook and visual slides on the subject | Öğretim Yöntemleri: Tartışma |
| 16 | Term Exams | Examination of course resources | Ölçme Yöntemleri: Yazılı Sınav, Ödev |
| 17 | Term Exams | Examination of course resources | Ölçme Yöntemleri: Yazılı Sınav, Ödev |
Student Workload - ECTS
| Works | Number | Time (Hour) | Workload (Hour) |
|---|---|---|---|
| Course Related Works | |||
| Class Time (Exam weeks are excluded) | 14 | 3 | 42 |
| Out of Class Study (Preliminary Work, Practice) | 14 | 5 | 70 |
| Assesment Related Works | |||
| Homeworks, Projects, Others | 0 | 0 | 0 |
| Mid-term Exams (Written, Oral, etc.) | 1 | 15 | 15 |
| Final Exam | 1 | 30 | 30 |
| Total Workload (Hour) | 157 | ||
| Total Workload / 25 (h) | 6,28 | ||
| ECTS | 6 ECTS | ||